Semiconductor Equipment Cleaning & Decontamination
From Process Contamination Removal to Cleaning Certification
Semiconductor manufacturing equipment accumulates chemical residues and process contaminants during operation. If these contaminants are not properly removed, they can create safety risks when equipment is relocated, modified, or decommissioned.
Semiconductor equipment cleaning is more than routine cleaning. It is a specialized process that safely removes hazardous residues and process contaminants from equipment and internal components, with the results documented through an official cleaning certificate.
BELFOR Korea provides precision decontamination of semiconductor equipment using specialized cleaning processes and equipment, followed by the issuance of a cleaning completion certificate.
Why Is Semiconductor Equipment Cleaning Necessary?
Hazardous process residues, chemical contaminants, and by-products can accumulate and become embedded inside semiconductor manufacturing equipment.
Before equipment can be relocated, modified, or decommissioned, these contaminants must be removed. An official cleaning certificate is then required to verify that hazardous substances no longer remain.
This means semiconductor equipment requires a qualified specialist who can not only remove embedded contamination from equipment and components, but also inspect the results and provide documented certification of the completed cleaning.
What Types of Semiconductor Process Equipment Do We Clean?
BELFOR Korea provides specialized cleaning and decontamination for a wide range of semiconductor manufacturing equipment and components.
- CMP
- Deposition
- Diffusion / Furnace
- Dry Etch / Plasma Etch
- Ion Implant
- Photolithography · Steppers & Tracks
- Wet Bench, Wet Etch, Wafer Clean
- Metrology
- Wafer Back Grinder
- ALD
Frequently Asked Questions
A. Semiconductor equipment cleaning is required when equipment is relocated, modified, decommissioned, or sold. Hazardous process gases and contaminants must be removed from internal components to ensure the equipment can be handled safely and a cleaning certificate can be issued.
A. Based on inspection results, including pH, acidity, and powder measurements, the certificate officially verifies that no hazardous substances remain on the equipment. It provides documented evidence of equipment safety and supports waste classification when equipment is relocated, sold, or disposed of.
A. BELFOR uses specialized cleaning agents developed by the BELFOR R&D Center in Germany to safely remove contaminants while minimizing the risk of damage to equipment surfaces.
A. BELFOR is a global disaster restoration company with more than 500 locations worldwide. As an IICRC-certified specialist in industrial cleaning and disaster restoration, BELFOR has the specialized equipment, expertise, and processes required for professional semiconductor equipment cleaning.
