Semiconductor Decontamination

Semiconductor decontamination refers to the specialised cleaning and restoration of semiconductor tools, cleanrooms, and production environments following incidents such as chemical spills, fires, or water ingress. These environments operate under extremely strict conditions to prevent contamination from airborne particles, moisture, or corrosive substances.

Because semiconductor manufacturing involves hazardous chemicals and delicate, high-precision tools, even minor contamination can halt production and result in costly downtime. Events like equipment failure, operator error, or fire can introduce particulates or residues that compromise sensitive machinery and surfaces.

BELFOR offers expert semiconductor decontamination services designed to quickly and safely restore affected facilities, including semiconductor clean rooms, production lines, and tools. Our goal is to minimise operational disruption while upholding cleanroom integrity and maintaining compliance with industry standards. With proven methodologies and a global support network, BELFOR helps semiconductor facilities recover with speed and precision.

Semiconductor Decontamination Services We Provide

BELFOR offers comprehensive semiconductor cleaning solutions for both cleanroom environments and broader facility areas affected by contamination. Semiconductor sites are especially vulnerable to incidents such as chemical leaks, airborne particles, and corrosive vapours—all of which can compromise cleanroom integrity and halt production.

Our services address cleanroom contamination through highly controlled decontamination methods that prioritise the protection of high-value equipment and ensure full compliance with cleanroom standards. We support rapid recovery after contamination events by restoring affected areas with minimal disruption to ongoing operations.

Whether addressing surface-level contamination or full cleanroom decontamination, BELFOR provides end-to-end solutions tailored to the unique demands of semiconductor environments.

Our Experience in Semiconductor Equipment Decontamination

BELFOR has extensive experience in semiconductor equipment decontamination, working in close collaboration with our Technical Support Department in Neufahrn, Germany. Together, we have developed specialised processes suited for ultra-clean, high-tech environments.

Our teams have successfully recovered critical tools such as lithography machines, etching stations, and testing equipment. Each decontamination is performed using methods designed for sensitive environments where even trace residues pose a risk.

From semiconductor wafer fabrication to testing, BELFOR has a proven track record of restoring facilities and safeguarding valuable tools. We offer shipping compliance and decontamination services to facilitate the safe transportation of tools, when it has to be relocated.

BELFOR also offers semiconductor parts cleaning, which will be sent out for repairs to ensure those parts are safe for handling.

Our Semiconductor Decontamination Process

BELFOR follows a meticulous, step-by-step process to ensure safe, thorough, and regulation-compliant recovery following contamination incidents in semiconductor environments. Our structured approach is tailored to cleanroom facilities, where any delay or misstep can severely impact yield and production timelines.

Contamination Assessment and Cleanroom Inspection – Our specialists conduct a full inspection to identify contamination sources, affected zones, and severity.

Dry Cleaning and Bulk Particle Removal – We begin with the removal of dust, particles, and debris using HEPA-filtered tools to minimise disruption.

Wet Cleaning Using BELFOR’s Proprietary Agents – Targeted application of certified cleaning agents ensures safe removal of chemical residues and corrosive contaminants.

Component-Level Decontamination – Delicate semiconductor parts are partially dismantled, cleaned, and carefully reassembled by trained personnel.

This proven method of semiconductor equipment decontamination helps prevent recurrence of cleanroom contamination, reduce downtime, and protect both assets and process integrity.

Why Choose BELFOR for Semiconductor Disaster Recovery

With over 30 years of experience, BELFOR is a trusted partner in semiconductor disaster recovery, known for rapid response, technical precision, and cleanroom-safe practices. We specialise in restoring critical environments with minimal disruption to operations.

Our teams use proprietary decontamination agents, certified PPE, and strict process controls to meet international cleanroom standards. Whether it’s restoring a single tool or a full semiconductor clean room, we tailor our solutions to the scale and urgency of each situation.

From chemical spills and fire incidents to airborne particle contamination, BELFOR has successfully handled high-stakes semiconductor decontamination projects across Asia. Our combination of local expertise and global technical support ensures recovery is efficient, compliant, and aligned with operational needs.

When production is at risk, BELFOR delivers confidence through experience, speed, and precision, helping clients return to safe and stable operations without unnecessary delay.