Semiconductor Decontamination

Semiconductor decontamination refers to the specialised cleaning and restoration of semiconductor tools, cleanrooms, and production environments following incidents such as chemical spills, fires, or water ingress. These environments operate under extremely strict conditions to prevent contamination from airborne particles, moisture, or corrosive substances.

Because semiconductor manufacturing involves hazardous chemicals and delicate, high-precision tools, even minor contamination can halt production and result in costly downtime. Events like equipment failure, operator error, or fire can introduce particulates or residues that compromise sensitive machinery and surfaces.

BELFOR offers expert semiconductor decontamination services designed to quickly and safely restore affected facilities, including semiconductor clean rooms, production lines, and tools. Our goal is to minimise operational disruption while upholding cleanroom integrity and maintaining compliance with industry standards. With proven methodologies and a global support network, BELFOR helps semiconductor facilities recover with speed and precision.

Specialised Semiconductor Decontamination Solutions

BELFOR provides precision cleaning and decontamination services designed to protect the integrity of sensitive semiconductor environments. From facility-level contamination to micro-level component cleaning, our methods ensure operational continuity, compliance with industry standards, and the protection of high-value assets.

Semiconductor Clean Room

A semiconductor clean room must operate under stringent contamination control standards to maintain production quality. BELFOR employs advanced decontamination techniques to remove airborne particles, chemical residues, and corrosive vapours that can compromise cleanroom performance. Every process is carried out within ISO-classified protocols to safeguard sensitive tools, wafers, and substrates while minimising downtime.

Semiconductor Parts Cleaning

Through our specialised semiconductor parts cleaning services, BELFOR restores precision components such as process chambers, vacuum parts, and quartzware to contamination-free conditions. Using controlled wet and dry cleaning methods, we remove microscopic particles, metal oxides, and chemical films without damaging delicate surfaces. This ensures that each part re-enters production meeting the cleanliness levels required for optimal semiconductor manufacturing performance.

Our Experience in Semiconductor Equipment Decontamination

BELFOR has extensive experience in semiconductor equipment decontamination, working in close collaboration with our Technical Support Department in Neufahrn, Germany. Together, we have developed specialised processes suited for ultra-clean, high-tech environments.

Our teams have successfully recovered critical tools such as lithography machines, etching stations, and testing equipment. Each decontamination is performed using methods designed for sensitive environments where even trace residues pose a risk.

From semiconductor wafer fabrication to testing, BELFOR has a proven track record of restoring facilities and safeguarding valuable tools. We offer shipping compliance and decontamination services to facilitate the safe transportation of tools, when it has to be relocated.

BELFOR also offers semiconductor parts cleaning, which will be sent out for repairs to ensure those parts are safe for handling.

Our Semiconductor Decontamination Process

BELFOR follows a meticulous, step-by-step process to ensure safe, thorough, and regulation-compliant recovery following contamination incidents in semiconductor environments. Our structured approach is tailored to cleanroom facilities, where any delay or misstep can severely impact yield and production timelines.

Contamination Assessment and Cleanroom Inspection – Our specialists conduct a full inspection to identify contamination sources, affected zones, and severity.

Dry Cleaning and Bulk Particle Removal – We begin with the removal of dust, particles, and debris using HEPA-filtered tools to minimise disruption.

Wet Cleaning Using BELFOR’s Proprietary Agents – Targeted application of certified cleaning agents ensures safe removal of chemical residues and corrosive contaminants.

Component-Level Decontamination – Delicate semiconductor parts are partially dismantled, cleaned, and carefully reassembled by trained personnel.

This proven method of semiconductor equipment decontamination helps prevent recurrence of cleanroom contamination, reduce downtime, and protect both assets and process integrity.

Why Choose BELFOR for Semiconductor Disaster Recovery

BELFOR combines decades of technical expertise with cleanroom-certified practices to support semiconductor facilities in the event of contamination incidents, fires, and chemical exposure. Our structured, compliance-driven approach ensures every recovery project is handled safely, efficiently, and with minimal disruption to production.

Proven Expertise in Semiconductor Recovery

With over 30 years of industry experience, BELFOR has managed complex semiconductor recovery projects across Asia. Our teams understand the precise environmental and operational demands of semiconductor facilities, ensuring that every recovery effort protects both equipment and yield integrity.

Cleanroom-Safe Processes and Materials

BELFOR applies proprietary decontamination agents, HEPA-filtered systems, and certified PPE designed for cleanroom compatibility. All recovery activities adhere to international semiconductor clean room standards, ensuring that ultra-sensitive tools and production environments are safeguarded from cross-contamination.

Tailored Solutions for Every Scale of Incident

From isolated tool decontamination to full facility restoration, BELFOR tailors its approach to the scale, urgency, and type of contamination in each project. Our flexibility enables controlled, phased recovery, minimising production disruptions.

Rapid Response and Global Technical Support

BELFOR’s global network enables fast mobilisation of resources and specialists for urgent recovery needs. Local teams collaborate closely with international experts to deliver coordinated, technically compliant disaster recovery solutions tailored to semiconductor operations.

Commitment to Safe and Efficient Operations

Every project is guided by the goal of restoring full operational safety and process stability. BELFOR’s recovery strategies are built to meet cleanroom certification requirements while ensuring production resumes quickly and confidently after an incident.

Frequently Asked Questions

What is semiconductor decontamination?

Semiconductor decontamination refers to the process of removing chemical residues, airborne particles, and other contaminants from cleanrooms, tools, and facility areas. These procedures help maintain the integrity of semiconductor production environments, where even microscopic impurities can disrupt manufacturing processes.

Why is semiconductor decontamination necessary?

Contaminants such as metal oxides, corrosive vapours, or particles can cause wafer defects and equipment malfunction. Regular semiconductor decontamination services help preserve product yield, ensure compliance with cleanroom standards, and reduce the risk of costly production downtime.

What happens during semiconductor clean room decontamination?

During a semiconductor clean room decontamination, trained specialists use certified cleaning agents, HEPA-filtered systems, and particle monitoring equipment to remove surface and airborne contaminants. The process is performed under strict ISO cleanroom standards to protect sensitive production tools and maintain environmental control.

How does semiconductor parts cleaning work?

Semiconductor parts cleaning involves precision cleaning of critical components such as process chambers, valves, and quartzware. Using wet or dry cleaning methods, contaminants are removed at a microscopic level to restore each part to production-ready condition without altering its surface integrity.

When should semiconductor decontamination be performed?

Decontamination should be conducted immediately after contamination events such as chemical leaks, fires, or particle intrusion. Routine cleaning schedules are also recommended to maintain compliance, prevent corrosion, and uphold operational standards in semiconductor manufacturing facilities.

Are semiconductor decontamination services safe for sensitive equipment?

Yes. Professional semiconductor decontamination services use non-abrasive materials, cleanroom-compatible tools, and controlled cleaning methods. Each process is designed to eliminate contaminants without damaging precision instruments or delicate surfaces.

Can BELFOR handle contamination caused by fire or chemical spills?

BELFOR’s teams are experienced in managing contamination resulting from fire, smoke, and chemical exposure in semiconductor environments. Our recovery process includes surface cleaning, corrosion control, and the removal of airborne particulates to restore safety and ensure efficient function.

How long does semiconductor decontamination take?

The duration depends on the contamination level, affected area, and type of facility. Smaller areas may be restored within hours, while full cleanroom recovery could require several days to ensure all surfaces and systems meet cleanroom certification standards.

What standards do semiconductor decontamination services follow?

BELFOR operates in accordance with international ISO cleanroom and semiconductor manufacturing standards. Our processes align with industry protocols for contamination control, ensuring full traceability and compliance across every stage of recovery.

Why choose BELFOR for semiconductor decontamination?

BELFOR combines global experience with local expertise to deliver comprehensive semiconductor decontamination and recovery solutions. Our cleanroom-certified teams respond promptly to incidents, restoring safe, compliant, and fully operational environments with minimal disruption to production.