Tool Decontamination Work

BELFOR carry out a wide range of decontamination and *recovery work for hazardous chemicals/gasses/ contaminated semiconductor tool/equipment/ancillary equipment that is to be relocated, storage (long/short term), spills/leaks, or contaminations.

Some of our specific tool/equipment experiences include:

Chemical Mechanical Planar (CMP) Systems
Chemical Vapor Deposition (CVD, incl. PECVD & SACVD) Systems
Furnaces (Nitride, Poly, Oxide)
Gas Control Panels
Ion Implanters
Physical Vapor Deposition (PVD) Systems
Spin/Rinse Dryers
Steppers
Valve Manifold Box (VMB)
Common utilities and support systems

BELFOR Technical Support Center can develop specific decontamination solutions to a wide variety of unique contamination situations in any industry.

* The definition of recovery here refers to the safety aspect/condition of the equipment. It is not a recovery of functional operation or design parameters.