BELFOR carry out a wide range of decontamination and *recovery work for hazardous chemicals/gasses/ contaminated semiconductor tool/equipment/ancillary equipment that is to be relocated, storage (long/short term), spills/leaks, or contaminations.
Some of our specific tool/equipment experiences include:
Chemical Mechanical Planar (CMP) Systems
Chemical Vapor Deposition (CVD, incl. PECVD & SACVD) Systems
Furnaces (Nitride, Poly, Oxide)
Gas Control Panels
Physical Vapor Deposition (PVD) Systems
Valve Manifold Box (VMB)
Common utilities and support systems
BELFOR Technical Support Center can develop specific decontamination solutions to a wide variety of unique contamination situations in any industry.
* The definition of recovery here refers to the safety aspect/condition of the equipment. It is not a recovery of functional operation or design parameters.