Parts Decontamination Work

BELFOR has a workshop facility in Taiwan that carry out a wide range of decontamination solution for parts contaminated through exposure to process chemicals/speciality gases/slurry/waste residue and returned to the client for repair/refurbishment/disposal or manufacturing reuse. 

Some of our specific experiences include parts from the following tools/equipment :

• Chemical Mechanical Planar (CMP) Systems
• Chemical Vapor Deposition (CVD, incl. PECVD & SACVD) Systems
• Furnaces (Nitride, Poly, Oxide)
• Ion Implanters
• Physical Vapor Deposition (PVD) Systems
• Steppers
• Valve Manifold Box (VMB)
• Common utilities and support systems
• Others (please check with BELFOR Taiwan).

BELFOR Technical Support Center can develop specific decontamination solutions to a wide variety of unique contamination  situations to any industries.