BELFOR has a workshop facility in Taiwan that carry out a wide range of decontamination solution for parts contaminated through exposure to process chemicals/speciality gases/slurry/waste residue and returned to the client for repair/refurbishment/disposal or manufacturing reuse.
Some of our specific experiences include parts from the following tools/equipment :
Chemical Mechanical Planar (CMP) Systems
Chemical Vapor Deposition (CVD, incl. PECVD & SACVD) Systems
Furnaces (Nitride, Poly, Oxide)
Physical Vapor Deposition (PVD) Systems
Valve Manifold Box (VMB)
Common utilities and support systems
Others (please check with BELFOR Taiwan).
BELFOR Technical Support Center can develop specific decontamination solutions to a wide variety of unique contamination situations to any industries.