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Semiconductor Equipment & Decontamination Procedures

BELFOR pioneered successful decontamination and recovery of technical equipment of all types, primarily following contamination events caused by fires, floods, water ingress, chemical spills and more. BELFOR uses decontamination procedures, evaluates and arranges transportation of semiconductor equipment globally, giving customers the assurance that it is being done safely and in compliance with applicable regulations.

BELFOR has the skills and practises to manage preventative and corrective maintenance activities throughout the decontamination process at semiconductor facilities — and to return them to normal operations as soon as possible following a crisis.

BELFOR has specific expertise in the decontamination of both “front-end” and “back-end” semiconductor equipment. Using various techniques such as gas detection and surface wipe sample analysis, BELFOR can identify the contamination source and perform decontamination processes to remove hazardous contaminants from equipment and tools.

Wafer Fabrication Facility “FAB” Decommissioning

BELFOR can provide full wafer “fab” decommissioning services, including the assessment and decontamination of all equipment and tools. Typically, the range of decontamination process services can include:

  • Equipment contamination assessment
  • Equipment decontamination
  • Removal, decontamination and disposal of forelines, exhaust lines, ducts, etc.
  • Rigging of equipment from within the cleanroom
  • Crating and transportation of equipment
  • Decontamination of facilities/utilities

Transportation Services

Contaminated semiconductor equipment can pose a considerable safety risk and must be treated as dangerous cargo. BELFOR can assess and begin decontamination procedures of the equipment prior to relocation, and provide documentation that declares the status of the equipment to freight forwarders, transportation regulatory authorities and to the party receiving the equipment.

Comprehensive Experience

BELFOR has carried out a wide range of semiconductor equipment decontamination projects, as well as several major semiconductor fab disaster recovery projects around the world. Some of our specific equipment experience includes:

  • Chemical Mechanical Planar (CMP) systems
  • Chemical Vapor Deposition (CVD, Inc., PECVD & SACVD) systems
  • Furnaces (Nitride, Poly, Oxide)
  • Gas Control Panels
  • Ion Implanters
  • Metrology Systems
  • Physical Vapor Deposition (PVD) systems
  • Spin/Rinse Dryers
  • Steppers
  • Wafer Packaging systems
  • Common utilities and support systems