{"id":3680,"date":"2026-11-09T15:13:27","date_gmt":"2026-11-09T06:13:27","guid":{"rendered":"https:\/\/www.belfor.com\/kr\/?p=3680"},"modified":"2026-11-09T15:20:38","modified_gmt":"2026-11-09T06:20:38","slug":"semiconductor-equipment-decontamination","status":"publish","type":"post","link":"https:\/\/www.belfor.com\/kr\/ko\/resources\/semiconductor-equipment-decontamination\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc7a5\ube44 \ud074\ub9ac\ub2dd\ub3c4 \uc5ed\uc2dc \ubca8\ud3ec"},"content":{"rendered":"\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/www.belfor.com\/kr\/wp-content\/uploads\/sites\/17\/2026\/11\/5\uc6d4-\uc628\uc0c8\ubbf8-1024x768.jpg\" alt=\"\" class=\"wp-image-3681\" srcset=\"https:\/\/www.belfor.com\/kr\/wp-content\/uploads\/sites\/17\/2026\/11\/5\uc6d4-\uc628\uc0c8\ubbf8-1024x768.jpg 1024w, https:\/\/www.belfor.com\/kr\/wp-content\/uploads\/sites\/17\/2026\/11\/5\uc6d4-\uc628\uc0c8\ubbf8-300x225.jpg 300w, https:\/\/www.belfor.com\/kr\/wp-content\/uploads\/sites\/17\/2026\/11\/5\uc6d4-\uc628\uc0c8\ubbf8-768x576.jpg 768w, https:\/\/www.belfor.com\/kr\/wp-content\/uploads\/sites\/17\/2026\/11\/5\uc6d4-\uc628\uc0c8\ubbf8-400x300.jpg 400w, https:\/\/www.belfor.com\/kr\/wp-content\/uploads\/sites\/17\/2026\/11\/5\uc6d4-\uc628\uc0c8\ubbf8-200x150.jpg 200w, https:\/\/www.belfor.com\/kr\/wp-content\/uploads\/sites\/17\/2026\/11\/5\uc6d4-\uc628\uc0c8\ubbf8.jpg 1920w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\ubc18\ub3c4\uccb4 \uc7a5\ube44 \uc774\uc804\u00b7\uac1c\uc870\u00b7\ud3d0\uae30 \uc804 \ud544\uc694\ud55c \uc804\ubb38 \ud074\ub9ac\ub2dd\uacfc \uc624\uc5fc \uc81c\uac70 \uc778\uc99d<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc81c\uc870\uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ud55c \uc7a5\ube44\uc640 \ubd80\ud488\uc5d0\ub294 \uacf5\uc815 \uac00\uc2a4\uc640 \ud654\ud559\ubb3c\uc9c8\uc5d0\uc11c \ube44\ub86f\ub41c \uc624\uc5fc\ubb3c\uc9c8\uc774 \ub0a8\uc544 \uc788\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc7a5\ube44\ub97c \uc774\uc804\ud558\uac70\ub098 \uac1c\uc870 \ub610\ub294 \ud3d0\uae30\ud560 \ub54c \uc774\ub7ec\ud55c \uc794\ub958\ubb3c\uc9c8\uc744 \uc81c\ub300\ub85c \uc81c\uac70\ud558\uc9c0 \uc54a\uc73c\uba74 \uc791\uc5c5\uc790\uc758 \uc548\uc804\uc740 \ubb3c\ub860, \uc774\ud6c4\uc758 \uc6b4\uc1a1\uacfc \ucc98\ub9ac \uacfc\uc815\uc5d0\ub3c4 \ubb38\uc81c\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud2b9\ud788 \uc624\uc5fc\ub41c \uc7a5\ube44\ub97c \ud3d0\uae30\ud558\ub824\ub294 \uae30\uc5c5\uc5d0\uac8c\ub294 \ucc98\ub9ac \ube44\uc6a9\ub3c4 \uc911\uc694\ud55c \ubb38\uc81c\uc785\ub2c8\ub2e4. \uc804\ubb38 \ud074\ub9ac\ub2dd\uc73c\ub85c \uc624\uc5fc\ubb3c\uc9c8\uc744 \uc81c\uac70\ud558\uba74, \uc7a5\ube44 \uc0c1\ud0dc\uc640 \uad00\ub828 \uae30\uc900\uc5d0 \ub530\ub77c \uc7ac\uc0ac\uc6a9 \ubc0f \uace0\ucca0 \ub9e4\uac01\uc744 \uac80\ud1a0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc7a5\ube44\ub294 \uc65c \uc804\ubb38 \ud074\ub9ac\ub2dd\uc774 \ud544\uc694\ud560\uae4c\uc694?<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\ub294 \ub2e4\uc591\ud55c \uac00\uc2a4\uc640 \ud654\ud559\ubb3c\uc9c8\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774 \uacfc\uc815\uc5d0\uc11c \ubc1c\uc0dd\ud55c \uc624\uc5fc\ubb3c\uc9c8\uc740 \uc7a5\ube44\uc758 \ud45c\uba74\ubfd0 \uc544\ub2c8\ub77c \ubc30\uad00\uacfc \ub0b4\ubd80 \ubd80\ud488\uc5d0\ub3c4 \ub0a8\uc744 \uc218 \uc788\uc73c\uba70, \uc77c\ubd80\ub294 \uc7a5\uae30\uac04 \uace0\ucc29\ub418\uae30\ub3c4 \ud569\ub2c8\ub2e4. \uc624\uc5fc\ubb3c\uc9c8\uc740 \uc77c\ubc18\uc801\uc778 \uc138\ucc99\ub9cc\uc73c\ub85c \ucda9\ubd84\ud788 \uc81c\uac70\ud558\uae30 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc7a5\ube44 \uc0ac\uc6a9 \uc774\ub825\uacfc \uc624\uc5fc\ubb3c\uc9c8\uc758 \ud2b9\uc131\uc744 \ud30c\uc545\ud558\uace0, \uc801\ud569\ud55c \ud074\ub9ac\ub2dd \ubc29\ubc95\uc744 \uc120\ud0dd\ud574\uc57c \ud569\ub2c8\ub2e4. \uc7a5\ube44\ub97c \ubd84\ud574\ud558\uac70\ub098 \uc678\ubd80\ub85c \ubc18\ucd9c\ud558\uae30 \uc804\uc5d0\ub294 \uc794\ub958 \uc624\uc5fc\uc5d0 \ub530\ub978 \uc704\ud5d8\uc744 \ubc18\ub4dc\uc2dc \ud655\uc778\ud558\uace0 \ud544\uc694\ud55c \uc548\uc804\uc870\uce58\ub97c \ucde8\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ubca8\ud3ec\uc758 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \ud074\ub9ac\ub2dd\uc740 \ubb34\uc5c7\uc774 \ub2e4\ub978\uac00\uc694?<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubca8\ud3ec\ub294 \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uc624\uc5fc\ubb3c\uc9c8\uc758 \ud654\ud559\uc801 \ud2b9\uc131\uc744 \uace0\ub824\ud574 \uc7a5\ube44\ubcc4 \ud074\ub9ac\ub2dd \ubc29\ubc95\uc744 \uacb0\uc815\ud569\ub2c8\ub2e4. \ub3c5\uc77c R&amp;D \uc13c\ud130\uc5d0\uc11c \uac1c\ubc1c\ud55c \uc804\uc6a9 \uc57d\ud488\uc744 \ud65c\uc6a9\ud558\uba70, \uc624\uc5fc \uc81c\uac70 \ud6a8\uacfc \ubc0f \uc7a5\ube44 \ud45c\uba74\uc758 \uc190\uc0c1 \uac00\ub2a5\uc131\uc744 \uace0\ub824\ud574 \uc791\uc5c5\uc744 \uc9c4\ud589\ud569\ub2c8\ub2e4. \ud074\ub9ac\ub2dd\uc740 \ucd1d 8\ub2e8\uacc4\ub85c \uc9c4\ud589\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<div class=\"separators-custom-box  \"  >\n\n\t\n\t\n\t\t            <div class=\"cta_title\"\n\t\t\t\t            >\uc601\uc0c1\uc73c\ub85c \ud655\uc778\ud558\uae30<\/div>\n\t\t\n\t\t            <a href=\"\/kr\/ko\/resources\/semiconductor-equipment-cleaning\/\"\n\t\t\t\t                style=\"background-color:;\"\n               class=\"c-btn -normal -inverted has-icon icon-right \"\n            >\n                <div class=\"label-up\"\n                                >\n                    <span class=\"c-btn__txt\">\ubca8\ud3ec \ubc18\ub3c4\uccb4 \uc7a5\ube44 \ud074\ub9ac\ub2dd<\/span>\n\t\t\t\t\t\t<span class=\"c-btn__ico\"><svg width=\"30\" height=\"30\" class=\"icon icon-lib-icon-arrow4 \" aria-hidden=\"true\" role=\"img\"><use xlink:href=\"#lib-icon-arrow4\"><\/use><\/svg><\/span>\n                <\/div>\n                <div class=\"label-up\">\n                    <span class=\"c-btn__txt\">\ubca8\ud3ec \ubc18\ub3c4\uccb4 \uc7a5\ube44 \ud074\ub9ac\ub2dd<\/span>\n\t\t\t\t\t\t<span class=\"c-btn__ico\"><svg width=\"30\" height=\"30\" class=\"icon icon-lib-icon-arrow4 \" aria-hidden=\"true\" role=\"img\"><use xlink:href=\"#lib-icon-arrow4\"><\/use><\/svg><\/span>\n                <\/div>\n            <\/a>\n\t\t\n\t<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc7a5\ube44 \ud074\ub9ac\ub2dd 8\ub2e8\uacc4<\/h3>\n\n\n\n<ol start=\"1\" class=\"wp-block-list\">\n<li><strong>\uc794\uc874 \uac00\uc2a4 \uce21\uc815 \ubc0f \uc548\uc804 \uc810\uac80<\/strong> \u2014 \uc791\uc5c5 \uc804 \uc7a5\ube44 \ub0b4\ubd80\uc758 \uc704\ud5d8 \uc694\uc18c\ub97c \ud655\uc778\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uac00\uc2a4 \ud37c\uc9c0(Gas Purge)<\/strong> \u2014 \ub0b4\ubd80\uc5d0 \ub0a8\uc544 \uc788\ub294 \uac00\uc2a4\ub97c \ubc30\ucd9c\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uc624\uc5fc\ubb3c\uc9c8 \uc81c\uac70 \ubc0f \ubd80\ud488 \ubd84\ud574<\/strong> \u2014 \uc624\uc5fc \uc0c1\ud0dc\ub97c \ud655\uc778\ud558\uace0 \ud544\uc694\ud55c \ubd80\ud488\uc744 \ubd84\ub9ac\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uc624\uc5fc \uc720\ud615 \ubd84\ub958 \ubc0f \ud3d0\uc218 \ucc98\ub9ac<\/strong> \u2014 \uc624\uc5fc\ubb3c\uc9c8\uc758 \ud2b9\uc131\uc5d0 \ub9de\ucdb0 \uc791\uc5c5 \ubc29\ubc95\uc744 \uad6c\ubd84\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uc54c\uce7c\ub9ac \uc138\uc815\uc81c \uce68\uc9c0<\/strong> \u2014 \ub300\uc0c1 \ubd80\ud488\uc5d0 \uc801\ud569\ud55c \uc138\uc815 \uacf5\uc815\uc744 \uc801\uc6a9\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uc54c\uce7c\ub9ac \uc138\uc815\uc81c \uace0\uc555 \uc138\ucc99<\/strong> \u2014 \uace0\ucc29\ub41c \uc624\uc5fc\ubb3c\uc9c8\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\ucd5c\uc885 \ub9b0\uc2a4(DI Water)<\/strong> \u2014 \ucd08\uc21c\uc218\ub97c \uc774\uc6a9\ud574 \uc794\ub958 \uc138\uc815\uc81c\uc640 \uc624\uc5fc\ubb3c\uc9c8\uc744 \uc53b\uc5b4\ub0c5\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\uac80\uc0ac\u00b7\uc7ac\uc870\ub9bd\u00b7\uc778\uc99d\uc11c \ubc1c\uae09<\/strong> \u2014 \ud074\ub9ac\ub2dd \uacb0\uacfc\ub97c \ud655\uc778\ud558\uace0 \uad00\ub828 \uae30\ub85d\uc744 \ubc1c\uae09\ud569\ub2c8\ub2e4.<\/li>\n<\/ol>\n\n\n\n<p class=\"wp-block-paragraph\"><em>\uc2e4\uc81c \uc791\uc5c5 \uc21c\uc11c\uc640 \uc138\uc815 \ubc29\ubc95\uc740 \uc7a5\ube44\uc758 \uad6c\uc870, \uc624\uc5fc\ubb3c\uc9c8 \ubc0f \ud604\uc7a5 \uc870\uac74\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/em><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uc624\uc5fc \uc81c\uac70 \uc778\uc99d\uc11c\ub294 \uc65c \ud544\uc694\ud560\uae4c\uc694?<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc7a5\ube44 \ud074\ub9ac\ub2dd\uc5d0\uc11c\ub294 \uc138\ucc99 \uc791\uc5c5\ubfd0 \uc544\ub2c8\ub77c \ud074\ub9ac\ub2dd \uacb0\uacfc\ub97c \ud655\uc778\ud558\uace0 \uae30\ub85d\ud558\ub294 \uacfc\uc815\ub3c4 \uc911\uc694\ud569\ub2c8\ub2e4. \ubca8\ud3ec\ub294 pH, \uc0b0\ub3c4, \ud30c\uc6b0\ub354 \uce21\uc815 \ub4f1 \ub300\uc0c1 \uc7a5\ube44\uc5d0 \ud544\uc694\ud55c \uac80\uc0ac\ub97c \uc9c4\ud589\ud558\uace0, \uadf8 \uacb0\uacfc\ub97c \uc778\uc99d\uc11c\ub85c \ubc1c\uae09\ud569\ub2c8\ub2e4. \uc774 \uc790\ub8cc\ub294 \uc7a5\ube44\uc758 \uc624\uc5fc \uc81c\uac70 \uc0c1\ud0dc\ub97c \ud655\uc778\ud558\uace0 \uc774\ud6c4 \uc774\uc804\u00b7\uc7ac\uc0ac\uc6a9\u00b7\ucc98\ub9ac \ubc29\uc548\uc744 \uac80\ud1a0\ud558\ub294 \ub370 \ud65c\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud3d0\uae30 \uc608\uc815\uc778 \uc7a5\ube44\ub098 \ubd80\ud488\uc758 \uacbd\uc6b0 \uc624\uc5fc \uc81c\uac70 \uc5ec\ubd80\uc5d0 \ub530\ub77c \ucc98\ub9ac \ubc29\ubc95\uacfc \ube44\uc6a9\uc774 \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. \ud3d0\uae30\ubb3c \ucc98\ub9ac\uac00 \ud544\uc694\ud588\ub358 \ubd80\ud488\ub3c4 \ud074\ub9ac\ub2dd \ud6c4 \uad00\ub828 \uae30\uc900\uacfc \ucc98\ub9ac\uc5c5\uccb4\uc758 \uc218\uc6a9 \uc870\uac74 \ub4f1\uc744 \ucda9\uc871\ud558\uba74 \uc77c\ubc18 \uace0\ucca0\ub85c \ud68c\uc218\ud558\uac70\ub098 \ub9e4\uac01\ud560 \uac00\ub2a5\uc131\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><em>\ucd5c\uc885 \ud3d0\uae30\ubb3c \ubd84\ub958 \ubc0f \ucc98\ub9ac \ubc29\ubc95\uc740 \uad00\ub828 \ubc95\ub839\uacfc \uac1c\ubcc4 \uc7a5\ube44\uc758 \uc0c1\ud0dc\uc5d0 \ub530\ub77c \ud310\ub2e8\ud574\uc57c \ud569\ub2c8\ub2e4.<\/em><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\uc5b4\ub5a4 \ubc18\ub3c4\uccb4 \uc7a5\ube44\ub97c \ud074\ub9ac\ub2dd\ud560 \uc218 \uc788\ub098\uc694?<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubca8\ud3ec\ub294 \uad6d\ub0b4\uc678 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud604\uc7a5\uc5d0\uc11c \ub2e4\uc591\ud55c \uacf5\uc815 \uc7a5\ube44\uc640 \ubd80\ud488\uc744 \ub300\uc0c1\uc73c\ub85c \ud074\ub9ac\ub2dd \uc791\uc5c5\uc744 \uc218\ud589\ud574 \uc654\uc2b5\ub2c8\ub2e4. \uc8fc\uc694 \uc791\uc5c5 \ub300\uc0c1\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CMP \ubc0f \uc99d\ucc29(Deposition) \uc7a5\ube44<\/li>\n\n\n\n<li>\ud655\uc0b0\u00b7\uc5f4\ucc98\ub9ac(Diffusion\/Furnace) \uc7a5\ube44<\/li>\n\n\n\n<li>\uac74\uc2dd \uc2dd\uac01(Dry Etch\/Plasma Etch) \uc7a5\ube44<\/li>\n\n\n\n<li>\uc774\uc628\uc8fc\uc785(Ion Implant) \uc7a5\ube44<\/li>\n\n\n\n<li>\ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c(Photolithography) \uad00\ub828 \uc7a5\ube44<\/li>\n\n\n\n<li>\uc2b5\uc2dd \uc2dd\uac01\u00b7\uc138\uc815(Wet Etch\/Wafer Clean) \uc7a5\ube44<\/li>\n\n\n\n<li>\uacc4\uce21(Metrology) \uc7a5\ube44<\/li>\n\n\n\n<li>\uc6e8\uc774\ud37c \ubc31\uadf8\ub77c\uc778\ub354(Wafer Back Grinder)<\/li>\n\n\n\n<li>ALD \uc7a5\ube44<\/li>\n\n\n\n<li><\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Gas Scrubber, Producer SE, MIR3000 \ub4f1 \ub2e4\uc591\ud55c \ubc18\ub3c4\uccb4 \uc124\ube44\uc5d0 \ub300\ud55c \ud074\ub9ac\ub2dd \uacbd\ud5d8\ub3c4 \ubcf4\uc720\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\ubc18\ub3c4\uccb4 \uc7a5\ube44\ub97c \ud3d0\uae30\ud558\uae30 \uc804, \ud074\ub9ac\ub2dd \uac00\ub2a5\uc131\ubd80\ud130 \ud655\uc778\ud558\uc138\uc694<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\ubc18\ub3c4\uccb4 \uc7a5\ube44\ub97c \uc774\uc804\ud558\uac70\ub098 \uac1c\uc870\u00b7\ud3d0\uae30\ud560 \uacc4\ud68d\uc774\ub77c\uba74 \uba3c\uc800 \uc7a5\ube44\uc5d0 \ub0a8\uc544 \uc788\ub294 \uc624\uc5fc\ubb3c\uc9c8\uacfc \ud074\ub9ac\ub2dd \ubc94\uc704\ub97c \ud655\uc778\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \ubca8\ud3ec\ucf54\ub9ac\uc544\ub294 \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc640 \ubd80\ud488\uc758 \uc624\uc5fc \uc0c1\ud0dc\ub97c \ud3c9\uac00\ud558\uace0 \uc804\ubb38 \ud074\ub9ac\ub2dd\ubd80\ud130 \uac80\uc0ac \ubc0f \uc778\uc99d\uc11c \ubc1c\uae09\uae4c\uc9c0 \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uc7a5\ube44\uc758 \uc548\uc804\ud55c \ucde8\uae09\uacfc \ud569\ub9ac\uc801\uc778 \uc790\uc0b0 \ucc98\ub9ac\ub97c \uc704\ud574 \uc804\ubb38\uc801\uc778 \uac80\ud1a0\uac00 \ud544\uc694\ud558\ub2e4\uba74 \ubca8\ud3ec\ucf54\ub9ac\uc544\ub85c \uc5f0\ub77d\ud558\uc138\uc694.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<div class=\"wp-block-embedpress-embedpress-pdf\"><div id=\"ep-gutenberg-content-d41d8cd98f00b204e9800998ecf8427e\" class=\"ep-gutenberg-content\"><div class=\"embedpress-document-embed ep-doc-embedpress-pdf-1794204647072   ep-fixed-width\" style=\"width:600px;height:600px;max-width:100%\" id=\"ep-doc-undefined\" data-source-id=\"source-undefined\" data-embed-type=\"PDF\" data-ep-views=\"off\" data-ep-downloads=\"off\"><div class=\"ep-embed-content-wraper\"><div 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