Semiconductor Equipment Services
The semiconductor industry demands stringent and unique contamination standards and BELFOR is ideally placed to provide a range of specialist assessment and decontamination services to this industry.
Tool Decontamination Services
Residual process contamination in tools that have been in production means that they cannot simply be transported from one location to another without specialist treatment, otherwise they may be required to be transported as ‘Dangerous Goods’. BELFOR routinely provides services to OEMs and fab operators to allow tools to be able to be transported safely, as non-dangerous goods:
You can now decontaminate and transport your semiconductor equipment globally, with the knowledge that it is safe and complies with relevant regulations.
Fabrication Facility Services
Wafer Fabrication Facility Decommissioning
BELFOR can provide full wafer “fab” decommissioning services, including the assessment and decontamination of all equipment within a wafer fab and facility. Typically, the range of services provided can include:
Equipment contamination assessment
Removal, decontamination and disposal of forelines, exhaust lines, ducts, etc.
Rigging of equipment from within the cleanroom
Crating and transportation of equipment
Decontamination of facilities/utilities
BELFOR can also provide extensive decontamination and recovery services for contaminated/damaged tools and equipment, utilities, cleanroom and building facilities following disaster incidents such as fires, water spills, chemical leaks, and environmental contamination incidents.